Quartz Glass Plate

Quartz Glass Plate

High purity fused silica flat plates with full custom machining for semiconductor, UV optics & laboratory equipment


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Felix Glass supplies custom quartz glass plates for OEM equipment manufacturers, semiconductor system integrators, optical laboratories and industrial engineering projects worldwide. We are a professional OEM quartz fabrication manufacturer specializing in semiconductor grade precision optical quartz components, produced from 99.99% SiO₂ raw material with three mainstream JGS optical grades to match deep UV, visible and infrared working environments.

Our flat quartz substrates feature ultra-low thermal expansion, outstanding thermal shock resistance and stable chemical inertness against most acids, alkalis and organic solvents. We support full precision custom processing including CNC cutting, drilling, edge chamfering and multi-layer AR optical coating, delivering standard and bespoke quartz sheets for semiconductor lithography equipment, UV laser optical systems, laboratory spectral analysis devices and aerospace optical detection instruments. All finished plates pass strict optical flatness and transmittance testing to meet international MIL optical industry standards for high-end precision industrial applications.

Product Specifications 


ParameterSpecification
Material99.99% High Purity Fused Silica (JGS1/JGS2/JGS3 optional)
Size Range10×10mm ~ 600×600mm, circular & irregular custom outlines
Thickness0.1mm ~ 50mm
Surface Quality60/40, 40/20, 20/10 MIL standard optical polish
Flatnessλ/2, λ/4, λ/10 at 632.8nm
Coating OptionsSingle/Double-sided AR anti-reflection coating, uncoated blank
Transmission Range185nm – 3500nm
Operating TemperatureUp to 1100°C Continuous
CTE5.5×10⁻⁷ /°C
ToleranceDimensional ±0.05mm, thickness ±0.02mm
CustomizationDrilling, counterbore, chamfer, silk printing, special coatings


Key Features 

✓ High Full-Spectrum Optical Transmission 
✓ Excellent Thermal Shock Stability & Low CTE 
✓ Precision CNC Custom Machining for All Outlines 
✓ Unlimited Custom Dimensions & Thickness Options 
✓ ISO 9001 Full Optical Quality Inspection 
✓ Fast OEM Sample & Mass Production Support

Manufacturing Capabilities 

  1. Full-Axis CNC Machining for complex outlines & holes
  2. Precision Edge Grinding & Safety Chamfer Processing
  3. Single & Double Sided Ultra-Fine Optical Polishing
  4. High-Temperature Tempering & Stress Relief Treatment
  5. Magnetron Sputtering Multi-Layer Optical Coating
  6. Complete Optical Performance Lab Inspection

  8. View Full Production Capacity



Available Material Grades 

  1. JGS1 Deep UV Grade
  2. JGS2 UV-Vis Grade
  3. JGS3 IR Infrared Grade
  4. 99.99% Standard Semiconductor Fused Silica

Check Full Material Parameter Database



Main Application Industries

  1. Semiconductor Lithography Wafer Substrates
  2. UV Laser Optical Test Systems
  3. Laboratory Spectroscopy & Electrochemistry
  4. High-Temperature Furnace Observation Windows
  5. Semiconductor Vacuum Chamber Equipment
  6. Aerospace UV Optical Sensors
  7. Medical UV Diagnostic Analytical Devices
  8. Photovoltaic Cell Testing Equipment

Custom Manufacturing Service 

  1. Full OEM & ODM one-stop optical glass customization
  2. Small prototype sample orders supported before mass production
  3. Ultra-low MOQ for laboratory & R&D startup clients
  4. Free technical drawing evaluation & customized solution design
  5. Custom coating, printing, shaping and hole layout processing

Why Choose Felix Glass 

  1. 19+ years professional fused silica optical glass manufacturing experience
  2. ISO 9001 certified full factory quality control system
  3. Independent optical testing laboratory for all performance indicators
  4. Stable export supply chain serving global industrial customers
  5. Standardized production line to guarantee consistent fast delivery

Frequently Asked Questions

  1. Q: What is the difference between JGS1, JGS2 and JGS3 quartz plate? 
  2. A: JGS1 excels at deep UV transmission; JGS2 balances UV and visible light; JGS3 is optimized for infrared spectrum applications.

  4. Q: What is the MOQ for custom quartz plates? 
  5. A: We offer ultra-low MOQ support; single prototype samples are available for R&D testing without large batch requirements.

  7. Q: Can Felix Glass manufacture according to customer CAD technical drawings?
  8.  A: Yes, our optical engineering team accepts 2D & 3D CAD drawings, provides free drawing review and customized quotation within 24 hours.

  10. Q: What is the maximum continuous working temperature of quartz glass plate? 
  11. A: Long-term stable working temperature reaches 1100°C, instant temperature shock resistance up to 1300°C.

  13. Q: Can you add AR anti-reflection coating on quartz plate? 
  14. A: Yes, single or double-sided multi-layer AR coating is available to raise transmittance over 97%.

  16. Q: Do you support ultra-thin fused silica quartz sheets?
  17.  A: Minimum customizable thickness is 0.1mm with full anti-chipping edge treatment.

  19. Q: Is quartz plate suitable for vacuum chamber use? 
  20. A: High-purity fused silica features extremely low outgassing, fully compliant with semiconductor vacuum environments.

  22. Q: What optical flatness grades can you provide? 
  23. A: λ/2, λ/4 and ultra-precise λ/10 flatness are available based on optical testing demands.

  25. Q: What is your production lead time for quartz glass plates?
  26.  A: Samples take 3–7 working days; mass orders 10–18 working days based on order quantity.

  28. Q: Can quartz plates resist chemical corrosion? 
  29. A: Fused silica is inert to most acids, alkalis and organic solvents, ideal for chemical lab testing equipment.

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